Greek Conference
| Authors: | Caviglia A., Iliadis A. |
|---|---|
| Title: | A Self Aligned Cobalt Silicide T Gate Process and It’s Applications to SOI Microwave MOSFETs |
| Conference: | 185th ECS/SOI Symposium |
| Editors: | |
| Ed: | No |
| Eds: | No |
| Pages: | |
| To appear: | No |
| Month: | |
| Year: | 1994 |
| Place: | San Fransisco |
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| Link: | |
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| Abstract: |