Greek Chapter in Book
| Authors: | Caviglia A., Iliadis A. |
|---|---|
| Chapter Title: | A Self Aligned Cobalt Silicide T Gate Process and It's Applications to SOI Microwave MOSFETs |
| Book: | Symposium on Silicon-On-Insulator Technology and Devices |
| Editors: | S. Cristoloveanu, K. Izumi, P. Hemment, H. Hosack |
| Ed: | No |
| Eds: | Yes |
| Pages: | 465-470 |
| Year: | 1994 |
| Place: | |
| Publisher: | |
| To appear: | No |
| Link: | |
| File name: |