Journal
Authors: | Iliadis A., Andronescu S., Edinger K., Orloff J., Vispute R., Talyansky V., Sharma R., Venkatesan T., Wood M., Jones K. |
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Title: | Ohmic Contacts to p-6H-SiC Using Focused Ion Beam Surface Modification and Pulsed Laser Epitaxial TiN Metal Deposition |
Journal: | Appl. Phys. Lett. |
Volume: | 73 |
Number: | 24 |
Pages: | 3545-3547 |
Year: | 1998 |
Publisher: | |
To appear: | No |
Link: | |
ISI: | No |
Impact Factor: | |
File name: | |
Abstract: |