Chapter in Book
Authors: | Iliadis A., Andronescu S., Edinger K., Orloff J., Talyansky V., Vispute R., Sharma R., Venkatesan T., Wood M., Jones K. |
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Chapter Title: | PLD Epitaxial TiN and Pt Ohmic Contacts to p-type 6H-SiC Using Focused Ion Beam Surface Modification |
Book: | Power Semiconductor Materials and Devices |
Editors: | S. J. Pearton, R. J. Shul, E. Wolfgang, F. Ren, S. Teconi |
Ed: | No |
Eds: | Yes |
Pages: | 253-258 |
Year: | 1998 |
Place: | |
Publisher: | |
To appear: | No |
Link: | |
File name: |