Chapter in Book

Authors: Iliadis A., Andronescu S., Edinger K., Orloff J., Talyansky V., Vispute R., Sharma R., Venkatesan T., Wood M., Jones K.
Chapter Title: PLD Epitaxial TiN and Pt Ohmic Contacts to p-type 6H-SiC Using Focused Ion Beam Surface Modification
Book: Power Semiconductor Materials and Devices
Editors: S. J. Pearton, R. J. Shul, E. Wolfgang, F. Ren, S. Teconi
Ed: No
Eds: Yes
Pages: 253-258
Year: 1998
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To appear: No
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