Conference

Authors: Iliadis A., Andronescu S., Yang J., Vispute R., Edinger K., Orloff J., Talyansky V., Sharma R., Venkatesan T., Wood M.
Title: The Process of Ohmic Contact Formation to P-6H-SiC by Focused Ion Beam Assisted Surface-Modification
Conference: 40th Electronic Materials Conference
Editors:
Ed: No
Eds: No
Pages: 48
To appear: No
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Year: 1998
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