Conference
Authors: | Iliadis A., Andronescu S., Yang J., Vispute R., Edinger K., Orloff J., Talyansky V., Sharma R., Venkatesan T., Wood M. |
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Title: | The Process of Ohmic Contact Formation to P-6H-SiC by Focused Ion Beam Assisted Surface-Modification |
Conference: | 40th Electronic Materials Conference |
Editors: | |
Ed: | No |
Eds: | No |
Pages: | 48 |
To appear: | No |
Month: | |
Year: | 1998 |
Place: | |
Pubisher: | |
Link: | |
File name: | |
Abstract: |